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SEMI S30 - Energetic Materials in Semiconductor R&D and Manufacturing Processes
A new SEMI Safety Standard was issued (SEMI S30-0719).
This Safety Guideline functions as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor R&D and manufacturing processes in all phases of use, from process chemical supply through abatement.
This standard shall be applied by manufacturer of Semiconductor Machine manufacturer, designing machines which are using chemicals.
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New standard SEMI S30 published