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Semi S2 & S8
SEMI S2 Assessment is Essential to Your Product's Success
To ensure a standard of safety throughout the industry and worldwide, the semiconductor equipment industry developed the SEMI S2 Guideline covering a large range of safety and health provisions, including regulatory requirements, electrical, mechanical, fire, chemical, radiation, noise, and ergonomics hazards; emergency shutdown, ventilation, and exhaust specifications; hazard warnings and more. TUV Rheinland of North America, Inc. has a team of highly qualified engineers and industrial hygienists to provide comprehensive, single-source SEMI S2 and S8 assessment to the latest version of the guideline and CE Marking / NRTL listing services.
SEMI S2 Assessments
Our joint team of TUV Rheinland engineers and certified industrial hygienists can perform this risk-based assessment on site. Our team members are heavily experienced in electrical/mechanical safety, chemical exposure assessments, ventilation, noise, ionizing radiation, non-ionizing radiation, lasers, environmental impact assessments, and other areas of expertise required by the SEMI S2 Guideline.
SEMI S2 Mark
TUV Rheinland offers third-party SEMI S2 mark for approved semiconductor manufacturing equipment. This mark not only increases product acceptance by assuring buyers and industry members that our customers have produced safe and compliant products, but it also provides a distinct marketing advantage when bidding on jobs.
SEMI S8: Ergonomics Evaluation
SEMI S8 Ergonomics Guidelines specific to the semiconductor industry are designed to enhance worker efficiency, production and maintenance, and minimize repetitive motion-related illness.
SEMI S8 is required as part of SEMI S2 assessment. Our staff is trained to assess, identify and provide solutions to worker-related ergonomics issues.
SEMI S23 Energy Conservation Testing
SEMI S23 "Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment" is becoming a purchase requirement for most device manufactures. S23 describes the quantification of energy, utilities & materials consumption, as well as measurement, monitoring together with ongoing target settings for improvements. Measured utilities and materials include: Exhaust, Vacuum, Cooling Water, Clean Dry Air, Nitrogen, Deionized Water, Heat Load Removal, and Electricity. TUV Rheinland has a full range of SEMI S23 testing capability for semiconductor manufacturing equipment.
SEMI S2 Waste Characterizations
Our team can conduct the appropriate testing and laboratory analysis to characterize the compositions of exhaust air, waste water, and solid waste streams.
Chemical Exposure Assessments
Our certified industrial hygienists can conduct testing in accordance with the National Institute for Occupational Safety and Health (NIOSH) and U.S. Federal OSHA guidelines to determine airborne levels of chemicals around processing equipment utilizing hazardous production materials (HPMs).
Testing capabilities include
- measurement with direct reading instrumentation for real-time worst case exposure analysis
- integrated sampling with pumps and diffusive monitors for short term (STEL) and full shift time-weighted average exposure analysis
Sampling results are compared with applicable exposure levels from OSHA (PEL, STEL, ceiling), ACGIH TLVs (TWA, STEL, ceiling), Canadian regulatory limits, and company-specific internal exposure limits. For SEMI S2, results are compared to the applicable Occupational Exposure Limit (OEL).
Ventilation Systems Assessments
TUV Rheinland has the expertise to conduct ventilation system assessments utilizing vapor visualization, air velocity measurements, and tracer gas studies of hazardous gas enclosures using sulfur hexafloride gas (SF6). Vapor visualization is used to assess the effectiveness of ventilation systems for wet stations, diffusion furnace scavengers, parts cleaning hoods, and spin coaters. Air velocity measurements are normally done for gas cabinets, diffusion furnace scavengers, parts cleaning hoods, and supplemental exhaust systems. Tracer gas analysis is a primary method used to assess gas cabinets, glove boxes, ovens, and gas boxes. Tracer gas analysis for SEMI S2 assessments is performed according to SEMI F15 guidelines, which have recently been incorporated into SEMI S6.
Ionizing Radiation Assessments
Radiation surveys can be provided for equipment which produces intentional or incidental ionizing radiation as well as for equipment which utilizes radioactive material sources. Assessments include comparison to U.S. Federal OSHA and Canadian Nuclear Safety Commission limits, adherence to ALARA (As Low As Readily Achievable) guidelines, and effectiveness of engineering and administrative controls.
Non-Ionizing Radiation and Fields Assessments
Non-ionizing radiation assessments include exposure measurements for static electric and magnetic fields, sub-radio frequency electric and magnetic fields, radio frequency (RF), infrared light (IR), ultraviolet light (UV), and visible light. Comparison is made to ACGIH, ANSI/IEEE, and Health Canada Radiation Protection Bureau guidelines. Determination of safe approach limits to magnetic fields for cardiac pacemaker wearers and those with magnetizable prostheses can be conducted, as well as safe distances for metal tools.
Laser Assessments
Assessments of equipment containing lasers evaluate compliance with U.S. FDA-CDRH, Canadian Radiation Devices Act and IEC 60825-1 requirements. Assessments include proper laser product classification and evaluation of the effectiveness of engineering controls, administrative controls (SOPs and labeling), temporary enclosures, and personal protective equipment (PPE).
Sound Pressure Level Assessments
Sound pressure level (SPL) equipment assessments compare sound pressure levels (noise) with SEMI S2 guidelines for continuous, intermittent, and impact SPLs. In addition, SPL studies to demonstrate compliance to U.S. Federal OSHA and Canadian provincial regulatory limits can be provided.
Environmental Considerations Assessments
SEMI S2 guidelines include assessment of potential environmental impacts for the entire life of SME (semiconductor manufacturing equipment). TUV Rheinland's S2 evaluations include assessments of the effectiveness of resource conservation; chemical selection; prevention and control of unintended releases; minimization of effluents, wastes, and emissions; and provisions for ultimate decommissioning and disposal of the equipment.
SEMI S2 - CE Marking - NRTL Listing - Field Evaluation Service (FES)
While assessing your machinery to the SEMI S2 Guideline, our team can simultaneously perform cost-effective testing and certification to meet the requirements of the CE Marking for the European Machinery, Low Voltage and EMC Directives as well as performing a NRTL listing or issuing a Field Label. CE Marking, which is necessary for exporting products to the European Union, can be obtained as part of your SEMI S2 assessment, providing you use of a European Notified Body, such as TUV Rheinland. TUV Rheinland is a National Recognized testing Laboratory (NRTL) accredited by OSHA and could issue listing to various US standards.
SEMI F47: Voltage Sag Standard
The SEMI F47 standard calls for industry equipment to be certified to tolerate various voltage sag durations as deemed safe and practical by the Semiconductor Industry Association (SIA) - 50 percent of nominal for a maximum of 200 milliseconds, 80 percent of nominal for one second, and son. TUV Rheinland can now provide on-site SEMI F47 testing in North America, Asia and Europe. Portable test equipment used at the customer site can test equipment running at up to 100 amps per phase (continuous). In addition to providing compliance assessments, the test equipment records up to 14 analog channels connected to points inside the customer's equipment during the sag. The data provided in this manner permits quick, simple fixes during sag immunity testing.
Product Design / Safety Compliance
We can work closely with machinery designers, domestically and internationally, to help identify and address potential hazards and compliance issues before they can become a problem. We can also help them meet end-user design review requirements early in the equipment development stage.
