SEMI S2 and S8 Directives

Solutions for the Semiconductor Industry

Safety assessment according to SEMI guidelines is a growing global requirement for semiconductor manufacturers. To ensure a standard of safety throughout the industry and worldwide, the semiconductor equipment industry developed the SEMI S2/S8 Guidelines covering a large range of safety and health provisions, including regulatory requirements, electrical, mechanical, fire, chemical, radiation, noise, and ergonomics hazards; emergency shutdown, ventilation, and exhaust specifications; hazard warnings and more. TÜV Rheinland has a team of highly qualified engineers and industrial hygienists to provide comprehensive, single-source SEMI S2 and S8 assessment to the latest version of the guideline and CE Marking / NRTL listing services.

Benefits at a Glance

With TÜV Rheinland certification of your Semiconductor Manufacturing Equipment, you can:

  • Demonstrate compliance to the required SEMI Standard
  • Decrease your risk of liability with safety standard documentation
  • Competitively postion your company with our independent test mark
  • Benefit from our years of experience and expertise
  • Take advantage of our highly qualified engineers and industrial hygenists to support with all your assessment needs

Our Services for the Semiconductor Manufacturing Equipment

SEMI S2 Assessments

Our joint team of TÜV Rheinland engineers and certified industrial hygienists can perform this risk-based assessment on site. Our team members are highly experienced in electrical/mechanical safety, chemical exposure assessments, ventilation, noise, ionizing radiation, non-ionizing radiation, lasers, environmental impact assessments, and other areas of expertise required by the SEMI S2 guideline.

SEMI S2 Mark

TÜV Rheinland offers third-party SEMI S2 Mark for approved semiconductor manufacturing equipment. This mark not only increases product acceptance by assuring buyers and industry members that our customers have produced safe and compliant products, but it also provides a distinct marketing advantage when bidding on jobs.

SEMI S8: Ergonomics Evaluation

SEMI S8 ergonomics guidelines specific to the semiconductor industry are designed to enhance worker efficiency, production and maintenance, and minimize repetitive motion-related illness.

SEMI S8 is required as part of SEMI S2 assessment. Our staff is trained to assess, identify and provide solutions to worker-related ergonomics issues.

SEMI S23 Energy Conservation Testing

SEMI S23 "Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment" is becoming a purchase requirement for most device manufactures. S23 describes the quantification of energy, utilities & materials consumption, as well as measurement, monitoring together with ongoing target settings for improvements. Measured utilities and materials include: exhaust, vacuum, cooling water, clean dry air, nitrogen, deionized water, heat load removal, and electricity. TÜV Rheinland has a full range of SEMI S23 testing capability for semiconductor manufacturing equipment.

SEMI S2 Waste Characterizations

Our team can conduct the appropriate testing and laboratory analysis to characterize the compositions of exhaust air, waste water, and solid waste streams.

Chemical Exposure Assessments

Our certified industrial hygienists can conduct testing in accordance with the National Institute for Occupational Safety and Health (NIOSH) and U.S. Federal OSHA guidelines to determine airborne levels of chemicals around processing equipment utilizing hazardous production materials (HPMs).

Testing capabilities include:

  • Measurement with direct reading instrumentation for real-time worst case exposure analysis
  • Integrated sampling with pumps and diffusive monitors for short term (STEL) and full shift time-weighted average exposure analysis
  • Sampling results are compared with applicable exposure levels from OSHA (PEL, STEL, and ceiling), ACGIH TLVs (TWA, STEL, and ceiling), Canadian regulatory limits, and company-specific internal exposure limits. For SEMI S2, results are compared to the applicable Occupational Exposure Limit (OEL).

Ventilation Systems Assessments

TÜV Rheinland has the expertise to conduct ventilation system assessments utilizing vapor visualization, air velocity measurements, and tracer gas studies of hazardous gas enclosures using sulfur hexafloride gas (SF6). Vapor visualization is used to assess the effectiveness of ventilation systems for wet stations, diffusion furnace scavengers, parts cleaning hoods, and spin coaters. Air velocity measurements are normally done for gas cabinets, diffusion furnace scavengers, parts cleaning hoods, and supplemental exhaust systems. Tracer gas analysis is a primary method used to assess gas cabinets, glove boxes, ovens, and gas boxes. Tracer gas analysis for SEMI S2 assessments is performed according to SEMI F15 guidelines, which have recently been incorporated into SEMI S6.

Ionizing Radiation Assessments

Radiation surveys can be provided for equipment which produces intentional or incidental ionizing radiation as well as for equipment which utilizes radioactive material sources. Assessments include comparison to U.S. Federal OSHA and Canadian Nuclear Safety Commission limits, adherence to ALARA (As Low As Readily Achievable) guidelines, and effectiveness of engineering and administrative controls.

Non-Ionizing Radiation and Fields Assessments

Non-ionizing radiation assessments include exposure measurements for static electric and magnetic fields, sub-radio frequency electric and magnetic fields, radio frequency (RF), infrared light (IR), ultraviolet light (UV), and visible light. Comparison is made to ACGIH, ANSI/IEEE, and Health Canada Radiation Protection Bureau guidelines. Determination of safe approach limits to magnetic fields for cardiac pacemaker wearers and those with magnetizable prostheses can be conducted, as well as safe distances for metal tools.

Laser Assessments

Assessments of equipment containing lasers evaluate compliance with U.S. FDA-CDRH, Canadian Radiation Devices Act and IEC 60825-1 requirements. Assessments include proper laser product classification and evaluation of the effectiveness of engineering controls, administrative controls (SOPs and labeling), temporary enclosures, and personal protective equipment (PPE).

Sound Pressure Level Assessments

Sound pressure level (SPL) equipment assessments compare sound pressure levels (noise) with SEMI S2 guidelines for continuous, intermittent, and impact SPLs. In addition, SPL studies to demonstrate compliance to U.S. Federal OSHA and Canadian provincial regulatory limits can be provided.

Environmental Considerations Assessments

SEMI S2 guidelines include assessment of potential environmental impacts for the entire life of SME (semiconductor manufacturing equipment). TÜV Rheinland’s S2 evaluations include assessments of the effectiveness of resource conservation; chemical selection; prevention and control of unintended releases; minimization of effluents, wastes, and emissions; and provisions for ultimate decommissioning and disposal of the equipment.

SEMI S2 - CE Marking - NRTL Listing - Field Evaluation Service (FES)

While assessing your machinery to the SEMI S2 Guideline, our team can simultaneously perform cost-effective testing and certification to meet the requirements of the CE Marking for the European Machinery, Low Voltage and EMC Directives as well as performing a NRTL listing or issuing a Field Label. CE Marking, which is necessary for exporting products to the European Union, can be obtained as part of your SEMI S2 assessment, providing you use of a European Notified Body, such as TÜV Rheinland. TÜV Rheinland is a National Recognized testing Laboratory (NRTL) accredited by OSHA and could issue listing to various US standards.

SEMI F47: Voltage Sag Standard

The SEMI F47 standard calls for industry equipment to be certified to tolerate various voltage sag durations as deemed safe and practical by the Semiconductor Industry Association (SIA) - 50 percent of nominal for a maximum of 200 milliseconds, 80 percent of nominal for one second, and son. TÜV Rheinland can now provide on-site SEMI F47 testing in North America, Asia and Europe. Portable test equipment used at the customer site can test equipment running at up to 100 amps per phase (continuous). In addition to providing compliance assessments, the test equipment records up to 14 analog channels connected to points inside the customer's equipment during the sag. The data provided in this manner permits quick, simple fixes during sag immunity testing.

Product Design / Safety Compliance

We can work closely with machinery designers, domestically and internationally, to help identify and address potential hazards and compliance issues before they can become a problem. We can also help them meet end-user design review requirements early in the equipment development stage.

The SEMI S2 and S8 Directives

TÜV Rheinland can test to the following standards developed by the Semiconductor Equipment and Materials International (SEMI) trade organization:

Standard Short Description
SEMI S1 Safety Guideline for Equipment Safety and Labels
SEMI S2 Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 Safety Guidelines for Process Liquid Heating System
SEMI S6 EHS Guidelines for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S8 Safety Guidelines for Ergonomics Engineering OF Semiconductor Manufacturing Equipment
SEMI S10 Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S13 Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 Safety Guidelines for Fire Risk, Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at the end of life
SEMI S17 Safety Guideline for Unmanned Transport Vehicle (UTV) Systems
SEMI S18 Environmental, Health, and Safety Guideline for Silane Family Gases Handling
SEMI S19 Safety Guideline for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel
SEMI S21 Safety Guideline for Worker Protection
SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S23 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment
SEMI S24 Safety Guideline for Multi-Employer Work Areas
SEMI S25 Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
SEMI S26 Environmental, Health, and Safety Guideline for FPD Manufacturing System