Continuous Emission and Process Monitoring of VOC / PFC

F + E - Vorhaben / Research and Development

Continuous Emission and Process Monitoring of VOC / PFC as Individual and Total Organic Compounds (CEMVOC)

CRAFT-Project,G6ST-CT-2001-50086

SME-Partner and Co-ordination:
Temet Instruments Oy, Finland, Helsinki: Jaakkola, P.; Ahro, M.;

SME-Partners:
Dünnschicht Anlagen Systeme GmbH, Germany, Dresden: Reichardt, H.; Frenzel, A.;
Mess- und Analysentechnik GmbH, Germany, Leverkusen: Kühn, B.; Kahl, M.;
Micro Analog Systems Oy, Finland, Espoo: Orpana, M..;
Ommer GmbH, Germany, Lindlar: Ommer, B.; Kirschnik, F.;

R&D:
TÜV Immissionsschutz und Energiesysteme GmbH, Department of Environmental Protection, Air Pollution Control, Germany, Köln: Jockel, W.; Kerpa, M.; Röllig, C.

Objectives:
The widely spread use of organic solvents in many industrial plants leads to the emissions of VOC (Volatile Organic Compounds) and PFC (Perfluoro Compounds).

The needs are:

1. To employ effective methods that allow reduction of harmful VOC/PFC emissions.
2. Effective and economical measurement techniques that have the capability for real-time monitoring of specific VOC/PFC chemicals, which could be utilised for process optimisation in terms of VOC/PFC emission reduction.

The prime objectives are:

1. To introduce practical solutions and to demonstrate that a remarkable reduction (20-60%) of harmful VOC and PFC emissions can be achieved with moderate costs.
2. To develop fully automated analysers, which can be used for process optimisation and specific VOC/PFC emission monitoring.
3. To approve the reliability of the gas analyser for VOC/PFC emissions monitoring.
4. To reduce costs for making the analysers affordable.
5. To increase competitiveness of the European instrument and semiconductor industry.
6. PFC are the most potent and persistent greenhouse gases, they will stay in the atmosphere for thousands of years. The U.S. EPA has serious concerns of various emissions of the semiconductor industry. SEMATECH, a non-profit American consortium, has published guidelines for emission reductions. Therefore it is important that the European industry can maintain its competitiveness in the marketplace.

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